Silicon microlens cleaning system

Details Silicon microlens cleaning system Silicon microlens cleaning system

H - Electricity

01

J

H01J 37/10 (2006.01) H01J 37/285 (2006.01) G01Q 80/00 (2010.01)

Patent

CA 2318787

A method and system for cleaning the silicon microlenses in an electron-beam microcolumn in situ. The microlenses individually are heated by passing a current through each microlens. The current is utilized to heat the microlens to at least two hundred degrees Centigrade to prevent contamination and occasionally to a temperature on the order of six to seven hundred degrees Centigrade to remove any builtup or potential contamination.

L'invention concerne un procédé et un système de nettoyage de microlentilles en silicium dans une microcolonne à faisceau électronique in situ. On chauffe les microlentilles individuellement en faisant passer un courant à travers chacune d'elles. Le courant sert à porter les microlentilles à une température d'au moins 200 ·C afin de prévenir une contamination et, parfois, à une température de l'ordre de 600 à 700 ·C pour éliminer toute contamination accumulée ou potentielle.

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