Silicon micromachined elastic flow valves

Details Silicon micromachined elastic flow valves Silicon micromachined elastic flow valves

F - Mech Eng,Light,Heat,Weapons

16

K

137/138, 26/162

F16K 7/14 (2006.01) B05B 1/02 (2006.01) B41J 2/175 (2006.01) F15C 5/00 (2006.01)

Patent

CA 1305393

- 11 - ABSTRACT OF THE DISCLOSURE A valve assembly has an elastic silicon valve plate and nozzle plate which are attached to each other and can be deflected from each other. Both have orifices for passing fluid through the valve assembly. The valve plate has mesas which can seal the orifices in the nozzle plate thereby stopping fluid flow.

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