Silicon micromachined non-elastic flow valves

Details Silicon micromachined non-elastic flow valves Silicon micromachined non-elastic flow valves

F - Mech Eng,Light,Heat,Weapons

16

K

137/138, 26/162

F16K 7/14 (2006.01) B05B 1/02 (2006.01) F02M 61/18 (2006.01) F15C 3/00 (2006.01) F15C 5/00 (2006.01) F16K 27/02 (2006.01)

Patent

CA 1298530

- 9 - ABSTRACT OF THE DISCLOSURE A valve assembly for controlling fluid flow includes a valve plate and a nozzle plate which are not attached to each other but can be moved into and out off contact with each other. The valve plate has an opening for passing an actuator and fluid. A nozzle plate has an opening for passing fluid and the opening is aligned with a mesa on the valve plate which can seal the nozzle orifice. The actuator separates the nozzle plate from the valve plate to permit fluid flow and a spring means brings the nozzle plate into a closed position against the valve plate to stop fluid flow.

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