Silicon nitride vacuum furnace process

Details Silicon nitride vacuum furnace process Silicon nitride vacuum furnace process

C - Chemistry, Metallurgy

01

B

23/195

C01B 21/068 (2006.01)

Patent

CA 2024139

ABSTRACT OF THE DISCLOSURE An improved process of preparing silicon nitride by the direct nitridation of silicon metal is disclosed. The process is a multi-step one which is substantially more efficient than prior processes and produces a silicon nitride having an oxygen content of less than 1%, a silicon metal content of less than 0.5%, and an alpha phase content of at least 85%, preferably at least 90%. The silicon nitride may be converted to a powder.

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