Silicon nozzle structure and method of manufacture

Details Silicon nozzle structure and method of manufacture Silicon nozzle structure and method of manufacture

B - Operations, Transporting

41

J

26/159, 101/96.0

B41J 2/16 (2006.01)

Patent

CA 1237020

- 1 - ABSTRACT OF THE DISCLOSURE A nozzle structure in a crystallographically oriented, monocrystalline silicon includes a pyramidal opening anisotropically etched from the entrance side of the nozzle and truncated in a membrane having a smaller cross-section than the initial cross-section of the entrance opening. The membrane has extending therethrough a pyramidal opening etched anisotropically from the exit side. The vertical axes of both openings are substantially concentric.

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