Silicon oxide particles

Details Silicon oxide particles Silicon oxide particles

C - Chemistry, Metallurgy

01

B

C01B 33/113 (2006.01) C01B 33/12 (2006.01) C01B 33/18 (2006.01) C09G 1/02 (2006.01) C09K 3/14 (2006.01) C11D 3/14 (2006.01) C11D 7/14 (2006.01) C11D 9/00 (2006.01) C11D 9/02 (2006.01) C11D 9/04 (2006.01) D02G 3/00 (2006.01) H01B 1/06 (2006.01)

Patent

CA 2333259

A collection of silicon oxide nanoparticles have an average diameter from about 5 nm to about 100 nm. The collection of silicon oxide nanoparticles effectively include no particles with a diameter greater than about four times the average diameter. The particles generally have a spherical morphology. Methods for producing the nanoparticles involve laser pyrolysis. The silicon oxide nanoparticles are effective for the production of improved polishing compositions including compositions useful for chemical-mechanical polishing.

Un ensemble de nanoparticules d'oxyde de silicium présente un diamètre moyen d'environ 5 nm à environ 100 nm. L'ensemble des nanoparticules d'oxyde de silicium ne comprend aucune particule d'un diamètre supérieur à environ 4 fois le diamètre moyen. Les particules ont, d'une manière générale, une morphologie sphérique. Des procédés de production des nanoparticules consistent en une pyrolyse au laser. Les nanoparticules d'oxyde de silicium sont efficaces dans la production de compositions de polissage améliorées comprenant des compositions utiles au polissage chimico-mécanique.

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