Silicon valve

Details Silicon valve Silicon valve

F - Mech Eng,Light,Heat,Weapons

16

K

137/137, 26/162

F16K 7/14 (2006.01) B41J 2/175 (2006.01) F02M 61/04 (2006.01) F02M 61/16 (2006.01) F02M 61/18 (2006.01) F15C 5/00 (2006.01)

Patent

CA 1275611

ABSTRACT OF THE INVENTION A silicon valve for controlling the flow of a fluid includes two generally planar silicon members. One has an orifice for passing the fluid and the other has a relatively moveable surface to selectively open and close the orifice thereby controlling the flow of fluid through the orifice.

500931

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