B - Operations – Transporting – 05 – D
Patent
B - Operations, Transporting
05
D
117/128, 117/162
B05D 3/02 (2006.01) B05D 1/38 (2006.01) B05D 3/04 (2006.01) B05D 5/12 (2006.01) C23C 18/12 (2006.01)
Patent
CA 2029074
SINGLE AND MULTILAYER COATINGS CONTAINING ALUMINUM NITRIDE Abstract Ceramic or ceramic-like single, two or multilayer coatings having aluminum nitride as one of the layers are provided, including methods for the preparation of such coatings which produce planarizing, passivating and hermetic barrier coatings on temperature sensitive substrates such as semiconductors and electronic devices. The aluminum nitride ceramic or ceramic-like coating is provided by applying a liquid alkylaluminum amide having the formula (R2AlNH2)3, where R is an alkyl group containing from 1 to 4 carbon atoms, neat or diluted in an organic solvent. The liquid coating is then dried, followed by heating the coating to a temperature of between about 400 to about 1000°C. in the presence of ammonia to produce an aluminum nitride-containing ceramic coating.
Dow Corning Corporation
Gowling Lafleur Henderson Llp
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