Single crystal sic and a method of producing the same

Details Single crystal sic and a method of producing the same Single crystal sic and a method of producing the same

C - Chemistry, Metallurgy

30

B

C30B 29/36 (2006.01) C30B 25/02 (2006.01)

Patent

CA 2252980

The single crystal SiC according to the invention is produced in the following manner. The surface 1a of a single crystal .alpha.-SiC substrate 1 is adjusted so as to have a surface roughness equal to or lower than 2,000 angstroms RMS, and preferably equal to or lower than 1,000 angstroms RMS. On the surface 1a of the single crystal .alpha.-SiC substrate 1, a polycrystalline .alpha.-SiC film 2 is grown by thermal CVD. Thereafter, the complex M is placed a porous carbon container 3, and the outer side of the carbon container 3 is covered with .alpha.-SiC powder 4. The complex M is subjected to a heat treatment at a high temperature equal to or higher than a film growing temperature, i.e., in the range of 1,900 to 2,400°C in an argon gas flow, whereby single crystal .alpha.-SiC is integrally grown on the single crystal .alpha.-SiC substrate 1 by crystal growth and recrystallization of the polycrystalline .alpha.-SiC film 2. It is possible to stably and efficiently produce single crystal SiC of a large size which has a high quality and in which any crystal nucleus is not generated.

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