Single diaphragm transducer with multiple sensing elements

Details Single diaphragm transducer with multiple sensing elements Single diaphragm transducer with multiple sensing elements

G - Physics

01

L

73/67

G01L 9/06 (2006.01) G01L 1/18 (2006.01) G01L 9/00 (2006.01)

Patent

CA 2035030

A transducer having a plurality of sensing elements disposed in a single diaphragm wherein each of the sensing elements is spaced from every other of the sensing elements a predetermined distance so as to control interference among the sensing elements. Each of the sensing elements preferably comprises a plurality of piezoresistors each of which are coupled in a Wheatstone bridge configuration. This transducer achieves sensitive, accurate, high spatial resolution measurements of non-uniform pressures.

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