Single mode operation of microelectromechanically tunable,...

H - Electricity – 01 – S

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H01S 5/00 (2006.01) H01S 5/183 (2006.01) H01S 5/02 (2006.01) H01S 5/10 (2006.01) H01S 5/14 (2006.01)

Patent

CA 2380742

A method is provided for fabricating a microelectromechanically tunable vertical-cavity surface-emitting laser (4) with precise lateral and vertical dimensional control. MEM-tunable VCSEL structures are provided which include a gain medium (6) located in a mechanically tunable high-Q Fabry-Perot cavity (8) formed by an upper (12) and lower (10) reflective dielectric film stack. Tuning is achieved by translational movement of the upper cavity-tuning reflective dielectric film stack (12) in a controlled electrostatic field. The current invention deals with the intracavity electrical contacts for current injection for this type of the MEM- tunable VCSEL. The current invention also includes various mechanisms to control the current injection profile so as to ensure single mode operation throughout the tuning range of the MEM-tunable VCSEL.

L'invention concerne un procédé de fabrication de VCSEL a réglage microélectromécanique à commande dimensionnelle latérale et verticale précise (4). L'invention concerne également des appareils de ce type comprenant un milieu amplificateur (6) situé dans une cavité de Fabry-Pérot à réglage mécanique à facteur de qualité élevé (8) constitué de piles de films diélectriques réfléchissants supérieure (12) et inférieure (10). Le réglage résulte d'un mouvement de translation de la pile supérieure (12) dans un champ électrostatique contrôlé. L'invention concerne en outre des contacts électriques intracavité permettant d'assurer l'injection de courant pour ce type de VCSEL. L'invention concerne par ailleurs différents mécanismes visant à contrôler le profil d'injection de courant pour maintenir un mode unique de fonctionnement sur toute la gamme de réglage des VCSEL considérés.

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