Single source volatile precursor for sio2 tio2 powders and...

Details Single source volatile precursor for sio2 tio2 powders and... Single source volatile precursor for sio2 tio2 powders and...

C - Chemistry, Metallurgy

07

F

C07F 7/22 (2006.01) C01B 33/20 (2006.01) C03C 17/245 (2006.01) C03C 17/25 (2006.01) C07F 7/04 (2006.01) C23C 16/40 (2006.01)

Patent

CA 2153019

Novel single-source volatile precursor compounds are disclosed, having the general formula (RO)3Si-O-Ti(OR)3 where each of the six R moieties in the C3 to C6 alkyl, preferably all being tert-butyl. The precursor compounds are suitable for use in dissociation methods, such as sol-gel and chemical vapor deposition, for preparing powders and films of stoichiometric SiO2.TiO2. Optical films to provide an anti-reflective surface on a lens, window or the like and powders for catalytic substrates, etc. are prepared using the SiO2.TiO2 yielded by the single-source volatile precursor compound.

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