Single substrate plasma discharge cell

Details Single substrate plasma discharge cell Single substrate plasma discharge cell

H - Electricity

01

J

313/1.3

H01J 61/30 (2006.01) H01J 17/49 (2006.01) H01J 61/067 (2006.01) H01J 61/10 (2006.01)

Patent

CA 1022225

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