Sintered body target for transparent conductive film...

H - Electricity – 01 – B

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H01B 1/02 (2006.01) B32B 7/02 (2006.01) B32B 15/08 (2006.01) C22C 29/12 (2006.01)

Patent

CA 2576359

A sintered body target for transparent conductive film fabrication is chiefly composed of Ga, In, and O; has a Ga content ranging from 49.1 at. % to 65 at. % with respect to all metallic atoms; is chiefly constructed from a.beta.-GaInO3 phase and an In2O3 phase; provides an In2O3 phase (400) / .beta.-GaInO3 phase (111) X-ray diffraction peak intensity ratio that is 45 % or less; and has a density of 5.8 g / cm3 or more. A transparent conductive film obtained by using a sputtering technique is an amorphous oxide transparent conductive film chiefly composed of Ga, In, and O, so that a Ga content ranges from 49.1 at. % to 65 at. % with respect to all metallic atoms, a work function is 5.1 eV or more, and a refractive index for light with a wavelength of 633 nm ranges from 1.65 to 1.85.

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