Sio2 structure having resistance to mobile ion contaminates...

Details Sio2 structure having resistance to mobile ion contaminates... Sio2 structure having resistance to mobile ion contaminates...

H - Electricity

01

L

148/1

H01L 29/00 (2006.01) H01L 21/3115 (2006.01) H01L 21/316 (2006.01)

Patent

CA 936790

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