Slotted diaphragm semiconductor device

Details Slotted diaphragm semiconductor device Slotted diaphragm semiconductor device

G - Physics

01

F

356/138, 73/74

G01F 1/68 (2006.01)

Patent

CA 1273227

ABSTRACT Disclosed is an integrated semiconductor device comprising a semiconductor body with a first surface having a predetermined orientation with respect to a crystalline structure in the semiconductor body. The semiconductor body has a depression formed into the first surface of the body. A layer of thin film material covers at least a portion of the first surface. The device further comprises apparatus comprising the layer of thin film material and further comprising a static electric, thermal-to-electric, or electric-to-thermal element. The diaphragm apparatus forms a slotted diaphragm substantially covering the depression. The slotted diaphragm comprises a slot sized and oriented so that, in the fabrication of the device, an anisotropic etch placed on the slot will undercut the diaphragm and form the depression. The static electric, thermal-to-electric, or electric-to- thermal element is substantially supported by the diaphragm and, therefore, is substantially thermally and physically isolated from the semiconductor body.

491906

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