Small component helium leak detector

Details Small component helium leak detector Small component helium leak detector

G - Physics

01

M

358/8

G01M 3/22 (2006.01) G01M 3/20 (2006.01)

Patent

CA 1254306

SMALL COMPONENT HELIUM LEAK DETECTOR ABSTRACT A small component leak detector is provided having (i) a vacuum chamber for receiving test objects, (ii) a cryogenic pump, and (iii) a mass detector. The cryogenic pump is capable of entrapping a purge carrier gas, such as nitrogen, but not entrapping a detecting gas, such as helium. The purge carrier gas is entrapped by the cryogenic pump and the mass detector detects any helium emitting from the test object. The process of detecting leaks using the foregoing apparatus in conjunction with a purge carrier gas, such as nitrogen, is also disclosed and claimed. The apparatus and process are especially designed for detecting leaks in small components, such as the hermetic seals of electronic components.

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