H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/02 (2006.01) H01L 21/00 (2006.01) H01L 21/3063 (2006.01) H01L 21/465 (2006.01) H01L 27/142 (2006.01) H01L 31/028 (2006.01) H01L 31/0352 (2006.01) H01L 31/04 (2006.01) H01L 31/042 (2006.01) H01L 31/18 (2006.01)
Patent
CA 2369204
A face side of the semiconductor crystal substrate is brought into contact with an electrolytic liquid containing a fluoride, and an electrode is disposed in the electrolytic liquid. A current is produced between the electrode and the semiconductor crystal substrate and applying light to a reverse side of the semiconductor crystal substrate to generate pairs of holes and electrons. The semiconductor crystal substrate is etched by combining the holes with ions in the electrolytic liquid thereby to form a multiplicity of through-holes in the semiconductor crystal substrate.
Emoto Makiko
Shibata Akio
Yokota Hiroshi
Ebara Corporation
Riches Mckenzie & Herbert Llp
LandOfFree
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