Solid state electromagnetic radiation detector

Details Solid state electromagnetic radiation detector Solid state electromagnetic radiation detector

H - Electricity

01

L

H01L 27/146 (2006.01) G01T 1/29 (2006.01)

Patent

CA 2087092

2087092 9202959 PCTABS00010 The present invention provides a large area, high pixel density solid state radiation detector (10) with a real-time and a non-destructive read-out. The solid state detector (10) comprises a plurality of field effect transistors (11) deposited onto a substrate (12) to form an array. A planarization layer (19) is deposited over the array of transistors (11). An energy sensitive layer (20) is deposited onto the planarization layer (19). Means (21) is provided for electrically connecting the energy sensitive layer (20) with each transistor (11) of the array. A top electrode layer (23) is deposited onto the energy sensitive layer (20). The solid state detector (10) also comprises circuitry means (17, 18) for providing electronic read-out from each field effect transistor (11) of the array.

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