Solid-state imaging device

Details Solid-state imaging device Solid-state imaging device

H - Electricity

04

N

345/4

H04N 3/14 (2006.01) H01L 27/146 (2006.01)

Patent

CA 1134932

SOLID-STATE IMAGING DEVICE Abstract of the Disclosure The invention relates to a solid-state imaging device having a plurality of photoelectric portions and a semiconductor substrate which includes scanning means for selecting the photosensitive portions in succession, the photoelectric portions including a layer of a photo- sensitive material overlying the semiconductor substrate and a transparent conductive film overlying the photo- electric material layer. The invention is characterized in that the photosensitive material of the solid-state imaging device is an amorphous material whose indis- pensable constituent is silicon and which contains hydrogen. The hydrogen content of the photosensitive material is preferably 5 atomic-% to 30 atomic-%, and especially 10 atomic-% to 25 atomic-%. Such an imaging device avoids the use of an electron beam and avoids many of the disadvantages of known solid-state imaging devices.

333976

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