H - Electricity – 01 – L
Patent
H - Electricity
01
L
345/11, 356/176
H01L 21/42 (2006.01) G02F 1/37 (2006.01) G03F 7/20 (2006.01) H01L 21/027 (2006.01) G02F 1/35 (2006.01)
Patent
CA 2025871
ABSTRACT The present invention is devised in consideration of the above-mentioned state of affairs and attempts to actualize a compact solid state laser device of a wavelength as short as that of an excimer laser as a light source for lithography. The present invention relates to a device characterized in providing a solid state laser and nonlinear optical materials which convert a solid state laser ray of light output from the solid state laser in wavelength into a ray of light of a short wavelength and using them as a light source for lithography. Also, the present invention relates to a semiconductor lithography method characterized in converting a laser ray of light output from a solid state laser In wavelength into a ray of light of a short wavelength using nonlinear optical materials and drawing semiconductor circuit patterns by use of the laser ray of light of a short wavelength. Using the present invention, a light source which copes with the degree of integration of ICs after the 16MDRAM and is suitable for IC manufacturing processes can be obtained by a more safe and more simply constituted solid state laser compared with an excimer laser, thereby allowing accurate semiconductor circuit patterns to be formed.
Itani Akira
Shimazaki Kazuo
Itani Akira
Mitsui Petrochemical Industries Ltd.
Shimazaki Kazuo
Smart & Biggar
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