Solubilized metal alkoxides in alkoxyalkanol solvent

C - Chemistry – Metallurgy – 09 – D

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117/110, 117/210

C09D 5/24 (2006.01) B05D 3/02 (2006.01) C07C 31/28 (2006.01) C07C 43/13 (2006.01) H01L 39/24 (2006.01)

Patent

CA 2002605

AST 5367 SOLUBILIZED METAL ALKOXIDES IN ALKOXYALKANOL SOLVENT ABSTRACT OF THE DISCLOSURE Metal alkoxides, including those not containing ligands derived from an alkoxy alcohol, can be solubilized in an alkoxyalkanol solvent. The resulting solution is useful in the fabrication of metal oxide films on a substrate.

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