Solutions of permonosulphuric acid

Details Solutions of permonosulphuric acid Solutions of permonosulphuric acid

C - Chemistry, Metallurgy

01

B

149/23

C01B 15/08 (2006.01) G03F 7/32 (2006.01) G03F 7/42 (2006.01)

Patent

CA 1316441

ABSTRACT Solutions of permonosulphuric acid Aqueous mixed permonosulphuric acid/sulphuric acid solutions, such as semiconductor surface photoresist stripping solutions may be stabilised for storage by the addition of one or more of the metals gallium, germanium, indium, tin in the 4-valent form, antimony, thallium, bismuth and lead suitably in the oxide or hydrous oxide form. Mixtures of metals, for example of bismuth, tin in the 4-valent form, gallium and germanium may be particularly effective.

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