H - Electricity – 01 – J
Patent
H - Electricity
01
J
H01J 37/20 (2006.01) H01J 37/26 (2006.01) H01L 41/09 (2006.01)
Patent
CA 2718546
A specimen holder assembly (500) suitable for tomographic inspection of a specimen in a transmission electron microscope comprising: a body portion (501) in the form of an elongate member arranged to be removably insertable into the column of the microscope; and a manipulator portion having a first axis, the manipulator portion comprising: a specimen mount portion (510) configured to support the specimen; a specimen translation assembly operable to translate the specimen mount portion with respect to the body portion; and a specimen rotation assembly (540) coupled to the body portion and to the specimen translation assembly (530), the specimen rotation assembly being operable to rotate the specimen translation assembly relative to the body portion about the first axis.
Un ensemble porte-spécimen approprié pour une inspection tomographique dun spécimen dans un microscope électronique à transmission comprend : une partie corps sous la forme dun organe allongé agencé pour être insérable de façon amovible dans la colonne du microscope; et une partie manipulateur comportant un premier axe, la partie manipulateur comprenant : une partie montant de spécimen configurée pour supporter le spécimen; un ensemble de translation de spécimen permettant de translater la partie montant de spécimen par rapport à la partie corps; et un ensemble de rotation de spécimen couplé à la partie corps et à lensemble de translation de spécimen, lensemble de rotation de spécimen permettant de faire tourner lensemble de translation de spécimen par rapport à la partie corps autour du premier axe.
Gay Ralph
Inkson Beverley
Lockwood Aiden James
Moebus Guenter
Wang Jing Jing
Borden Ladner Gervais Llp
University Of Sheffield
LandOfFree
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