Spin-on glass processing technique for the fabrication of...

Details Spin-on glass processing technique for the fabrication of... Spin-on glass processing technique for the fabrication of...

H - Electricity

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117/104, 117/162

H01L 21/31 (2006.01) H01L 21/3105 (2006.01) H01L 21/312 (2006.01) H01L 21/316 (2006.01) H01L 21/56 (2006.01) H01L 21/768 (2006.01) H01L 23/29 (2006.01)

Patent

CA 2009518

A method of applying a spin-on glass layer to a substrate is disclosed wherein the spin-on glass is applied as a plurality of contiguous thin layers that together form a composite layer. Each thin layer is cured prior to the application of the next layer at a temperature of at least about 300°C, preferably 350°C, for a time sufficient to permit catalyst connection and substantially eliminate volatile residual solvents contained therein. In this way cracking in organic SOGs can be substantially eliminated, and beneficial results can also be achieved with quasi-organic SOGs.

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