Sputter-coating of glass sheets or other substrates

Details Sputter-coating of glass sheets or other substrates Sputter-coating of glass sheets or other substrates

H - Electricity

01

J

204/96.03, 204/1

H01J 37/34 (2006.01) C23C 15/00 (1980.01)

Patent

CA 1083526

ABSTRACT A cathode for use in the sputter-coating of thin films of a selected coating material on glass sheets and other substrates, and means for cooling the same. The cathode is of rectangular construction including a top wall, a bottom; wall and side and end walls defining a closed chamber therein. The cathode is internally cooled by circulating a cooling medium, such as oil, under a constant head pressure, through a closed system in which the cathode is interposed, and means for con- tinuously withdrawing air and any other gases from the system such that as the oil circulates through the cathode chamber it will exert a pressure, less than atmospheric pressure, upon the walls of said cathode and thereby reduce the pressure differential across the cathode walls.

270089

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