Sputtered dielectric thin films

Details Sputtered dielectric thin films Sputtered dielectric thin films

G - Physics

02

B

204/96.12

G02B 5/28 (2006.01) C03C 17/09 (2006.01) C23C 14/00 (2006.01) H01L 49/02 (2006.01)

Patent

CA 1014889

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