Sputtered electrodes

Details Sputtered electrodes Sputtered electrodes

H - Electricity

01

M

319/22, 319/4, 2

H01M 4/86 (2006.01) C23C 14/35 (2006.01) C25B 11/04 (2006.01) H01M 4/88 (2006.01) H01M 8/12 (2006.01)

Patent

CA 1134902

ABSTRACT OF THE DISCLOSURE The present invention concerns a process for manufac- turing electrodes for fuel cells operating at elevated tempera- ture, said process consisting in depositing by cathodic sputter- ing on a solid electrolyte substrate active mixtures of oxides and metals, the control of the relative rates of deposition of the various constituents of these active compositions being achieved by regulating individually independent magnetic fields acting on each of the components subjected to sputtering. A very high degree of homogeneity within the layers and of repro- ducibility of the compositions of the mixtures is achieved in this manner.

325795

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