Sputtering of lithium using alternating sputtering potential

Details Sputtering of lithium using alternating sputtering potential Sputtering of lithium using alternating sputtering potential

C - Chemistry, Metallurgy

23

C

C23C 14/34 (2006.01) C23C 14/18 (2006.01) C23C 14/35 (2006.01)

Patent

CA 2238319

Lithium is sputtered from a target (22) with a metallic lithium surface using an alternating sputtering potential (38) with a frequency between about 8 and about 120 kHz, preferably about 10-100 kHz or using a DC sputtering potential and a reverse cleaning potential applied intermittently. The process can be used to apply lithium to electrochromic materials such as coating on window glass.

On pulvérise du lithium depuis une cible (22) présentant une surface lithium métallique au moyen d'un potentiel de pulvérisation en courant alternatif (38), avec une fréquence comprise entre environ 8 et environ 120 kHz, de préférence dans la tranche 10-100 kHz, ou au moyen d'un potentiel inverse de nettoyage appliqué de façon intermittente. Le procédé peut être utilisé pour appliquer du lithium à des matériaux électrochromiques tels que des revêtements sur vitrages.

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