Sputtering process for preparing stable thin film resistors

Details Sputtering process for preparing stable thin film resistors Sputtering process for preparing stable thin film resistors

H - Electricity

01

C

204/96.1

H01C 7/06 (2006.01) H01C 17/12 (2006.01) H01J 37/34 (2006.01)

Patent

CA 898185

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