H - Electricity
01
L
H01L 39/22 (2006.01) G01R 33/035 (2006.01)
Patent
CA 2323128
A superconducting thin film pattern (20) formed from an oxide superconducting thin film is formed on a sapphire substrate (10) having a step (11) via a CeO2 buffer layer, and the step (11) and superconducting thin film pattern (20) are formed such that the step (11) crosses a predetermined portion of a square thin film pattern (22) having an opening portion (23) at the central portion. Step-edge Josephson junctions (26, 27) are formed at the portion crossed by the step (11), and a SQUID is obtained. The sapphire substrate is relatively inexpensive, and a large substrate can be used.
Itozaki Hideo
Kugai Hirokazu
Matsui Yasuyuki
Nagaishi Tatsuoki
Bereskin & Parr
Sumitomo Electric Industries Ltd.
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