H - Electricity – 01 – S
Patent
H - Electricity
01
S
H01S 3/00 (2006.01) G02B 7/00 (2006.01) H01S 3/02 (2006.01) H05K 7/00 (2006.01) H01S 3/225 (2006.01)
Patent
CA 2194333
A laser system support structure is provided having an independent, kineatically mounted chamber and optics platform. Swivel-type mounts are used to couple the platform at three points to the laser support frame, thereby allowing the platform to remain static while the support frame, via the swivel mounts, deflects around the platform in response to external forces. The independent platform design provides secondary benefits of creating a compartmentalization of laser system components, leading to a modular type design. Each laser system module is mounted to the support structure on an extension rail, to allow removal of the module from the support frame for easy access during servicing.
Deruyter Anthony John
Gerent Jerry Rudy
Larson Donald Glenn
Mixon Curtiss Lynn
Cymer Inc.
Gowling Lafleur Henderson Llp
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