Stabilizer for acidic, metal-containing polishing baths

Details Stabilizer for acidic, metal-containing polishing baths Stabilizer for acidic, metal-containing polishing baths

C - Chemistry, Metallurgy

09

G

C09G 1/02 (2006.01) C23G 1/02 (2006.01)

Patent

CA 2602992

The present invention relates to the use of a mixture of urea and one or more alkane-diphosphonic acids, optionally substituted with one or more hydroxyl or amino groups, or salts thereof for the stabilization of an acidic, metal- and peroxide-containing polishing solution. The invention also relates to peroxide-containing solutions that are suitable for the stabilization of acidic, metal- and peroxide-containing polishing baths, and acidic, peroxide- containing polishing solutions that contain the stabilizer mixture according to the invention. A method of chemical polishing of metal surfaces using the stabilizer according to the invention is also described.

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