Static interferometric ellipsometer

Details Static interferometric ellipsometer Static interferometric ellipsometer

G - Physics

01

N

73/54

G01N 21/84 (2006.01) G01N 21/21 (2006.01)

Patent

CA 1264959

Abstract A static interferometric ellipsometer has a source which generates a coherent light beam having two monochromatic radiations at slightly different frequencies, a first photodetector which generates a first beat between the two radiations to be used as a reference, a second photodetector which generates a second beat between the two radiations, after they have been polarized in perpendicular planes and separated to follow separate paths so that only one of them is reflected by the sample under test, and a measuring and computing system which determines the optical properties of the sample from the amplitude of the second beat and the relative phase between the two beats.

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