Stereo scanning electron microscopy

Details Stereo scanning electron microscopy Stereo scanning electron microscopy

H - Electricity

01

J

358/10.1

H01J 3/00 (2006.01) H01J 37/147 (2006.01) H01J 37/256 (2006.01)

Patent

CA 1044818

ABSTRACT A scanning electron microprobe and display system adaptable to stere? or side-by-side viewing of an image for comparison on a television type monitor. The apparatus includes means for scanning the microprobe beam in a raster over a specimen and displaying the image on the cathode ray tube viewer. The microprobe beam scan is synchronized to the beam of the cathode ray tube and the cathode ray tube horizontal scan is blanked over a portion of its extent for sequential fields. For Stereo viewing, the angle of incidence of the microprobe is varied in relation to the blanking sequence to provide side-by-side images on the cathode ray tube, each of which are generated from different microprobe incidence angles.

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