Sterilization system employing a switching module adapted to...

A - Human Necessities – 61 – L

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A61L 2/14 (2006.01) A61L 2/18 (2006.01) A61L 2/20 (2006.01) A61L 2/24 (2006.01) H05H 1/24 (2006.01)

Patent

CA 2377253

A sterilization system and method applies low frequency power to a plasma within a vacuum chamber to remove gas or vapor species from an article. The sterilization system includes a switching module adapted to pulsate the low frequency power applied to the plasma and a low frequency power feedback control system for controllably adjusting the low frequency power applied to the plasma. A power monitor is adapted to produce a first signal indicative of the low frequency power applied to the plasma within the vacuum chamber. A power control module is adapted to produce a second signal in response to the first signal from the power monitor, and a power controller is adapted to adjust, in response to the second signal, the low frequency power applied to the plasma to maintain a substantially stable average low frequency power applied to the plasma while the article is being processed.

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