Storage and delivery system for gaseous compounds

Details Storage and delivery system for gaseous compounds Storage and delivery system for gaseous compounds

B - Operations, Transporting

01

D

B01D 53/04 (2006.01) B01J 20/20 (2006.01) F17C 11/00 (2006.01)

Patent

CA 2202466

An adsorption-desorption apparatus (102), and process for storage and dispensing of a gas, e.g., hydride and halide gases, and organometallic Group V compounds, which is selectively dispensed by pressure differentiai desorption of the sorbate gas from the sorbent material. The sorbent material is preferably a material which is devoid of concentration of trace components such as water, metals and oxidic transition metal species which would significantly decompose the sorbate gas in apparatus (102).

L'invention se rapporte à un procédé et à un appareil d'adsorption-désorption (102) pour le stockage et la distribution d'un gaz, par ex. des gaz d'hydrure et des gaz d'halogénure et des composés organométalliques du groupe V, qui est sélectivement diffusé par désorption différentielle de pression du gaz sorbé présent dans un matériau sorbant physique. Ce dernier est de préférence un matériau dépourvu d'une concentration de constituants en traces, tels que de l'eau, des métaux et des espèces d'éléments de transition obtenus par voie d'oxydation, susceptibles de décomposer notablement le gaz sorbé dans l'appareil (102).

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