C - Chemistry – Metallurgy – 09 – D
Patent
C - Chemistry, Metallurgy
09
D
149/28
C09D 9/00 (2006.01) G03F 7/42 (2006.01)
Patent
CA 1177373
STRIPPING COMPOSITIONS AND METHODS OF STRIPPING RESISTS Abstract of the Disclosure Stripping compositions for removing resist materials from substrates comprise compositions of a 2-pyrrolidinone compound and a tetrahydrothiophene 1,1-dioxide compound. Either or both of polyethyl- ene glycol and a diethylene glycol monoalkyl ether may be added to provide even more effective stripp- ing compositions.
410265
Hallquist Lisa G.
Hurley Thomas J.
Ward Irl E. Jr.
Baker (j.t). Chemical Company
Osler Hoskin & Harcourt Llp
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