Stripping compositions and methods of stripping resists

Details Stripping compositions and methods of stripping resists Stripping compositions and methods of stripping resists

C - Chemistry, Metallurgy

09

D

149/28

C09D 9/00 (2006.01) G03F 7/42 (2006.01)

Patent

CA 1194765

STRIPPING COMPOSITIONS AND METHODS OF STRIPPING RESISTS Abstract of the Disclosure Stripping compositions for removing resist materials from substrates comprise compositions of a 2-pyrrolidinone compound and a dialkyl sulfone com- pound. Either or both of polyethylene glycol and a diethylene glycol monoalkyl ether may be added to provide even more effective stripping compositions.

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