Structure and fabrication process for self-aligned locally...

H - Electricity – 01 – L

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H01L 31/042 (2006.01) H01L 21/328 (2006.01) H01L 31/0224 (2006.01) H01L 31/068 (2006.01) H01L 31/18 (2006.01)

Patent

CA 2232857

A solar cell (10) having self-aligned metal electrodes (14) and underlying relatively deep emitter regions (21) joined by relatively shallow emitter regions (22) under the surface not covered by the electrodes is formed in a semiconductive substrate (12) by forming relatively shallow p+ and n+ diffusion regions on the front and back surfaces, respectively, of a silicon semiconductive substrate (12), screen printing aluminum onto the front surface of the substrate in a desired electrode pattern, heat treating the developing cell to form the relatively deep p+ type emitter regions (21) underneath the electrode pattern, while growing an oxide passivation layer (18) over the uncovered portions of the substrate surface, applying an antireflective coating (19) to the front surface in the regions not covered by the electrodes, and screen printing silver (20) over the electrodes on the front surface and over the back surface of the solar cell.

On constitue, dans un substrat semi-conducteur (12), une pile solaire (10) comportant des électrodes (14) métalliques auto-alignées et des régions émettrices (21) sous-jacentes relativement profondes reliées par des régions émettrices (21) relativement peu profondes situées sous la surface non recouverte par les électrodes, en constituant des régions de diffusion p+ et n+ relativement superficielles sur les surfaces avant et arrière, respectivement, d'un substrat (12) de silicium semi-conducteur; on dépose de l'aluminium par sérigraphie sur la surface avant du substrat selon un motif d'électrodes désiré; on traite thermiquement la cellule en développement de façon à constituer les régions émettrices (21) p+ et n+ relativement profondes sous le motif d'électrodes, tout en recouvrant d'une couche d'oxyde de passivation (18) les parties non recouvertes de la surface du substrat; on applique un revêtement antireflet (19) sur la surface avant, au niveau des régions non recouvertes par les électrodes; et on dépose de l'argent (20) par sérigraphie sur les électrodes de la surface avant et sur la surface arrière de la pile solaire.

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