C - Chemistry – Metallurgy – 08 – F
Patent
C - Chemistry, Metallurgy
08
F
C08F 212/08 (2006.01) C08F 222/20 (2006.01) G03F 7/033 (2006.01) G03F 7/038 (2006.01)
Patent
CA 2058076
Terpolymers of styrene, mono-iso-butyl maleate and mono-2-(n-butoxy)ethyl maleate wherein the ratio of styrene units to maleate units is in the range of about 1:1 to about 1.6:1 and the ratio of mono-iso-butyl maleate units to mono 2-(n-butoxy)ethyl maleate is in the range of about 3:2 to about 1:3. The terpolymers are useful as alkali soluble binders for photoresist compositions.
Les terpolymères de styrène, de maléate de mono-2-(n-butoxy)éthyle et de maléate de mono-iso-butyle, où le rapport unités de styrène/unités de maléate se situe dans une plage de 1:1 à 1.6:1 environ, pour un rapport d'unités de maléate de mono-iso-butyle/unités de maléate de mono 2-(n-butoxy)éthyle de 3:2 à 1:3 environ. Les terpolymères sont utiles comme liants solubles dans les alcalis pour les compositions de photorésine.
Hercules Incorporated
Mcfadden Fincham
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