C - Chemistry – Metallurgy – 07 – F
Patent
C - Chemistry, Metallurgy
07
F
260/434, 260/446
C07F 7/08 (2006.01) C07F 7/22 (2006.01) C07F 7/30 (2006.01) C08G 2/00 (2006.01) G03F 7/039 (2006.01) G03F 7/075 (2006.01)
Patent
CA 1272205
Substituted o-phthalaldehydes Abstract of the Disclosure There are disclosed novel substituted o-phthalaldehydes of formula I Image (I), wherein at least one of the substituents R1, R2, R3, R4 is Q(alkyl)3, -CH2-Q(alkyl)3, -O-Q(alkyl)3, -Q(aryl)3 or -Q(alkylene- aryl)3, wherein Q is Si, Sn or Ge, the alkyl moieties contain 1 to 12 carbon atoms, the aryl groups contain 6 or 12 ring carbon atoms and the alkylene radicals contain 1 to 4 carbon atoms, and each of the remaining substituents R1 to R4 is a hydrogen or halogen atom or a cyano, nitro, carboxyl or hydroxyl group, a C1-C4alkoxy, C1-C4alkyl- thio or an alkoxycarbonyl group containing 1 to 4 carbon atoms in the alkoxy moiety. The novel o-phthalaldehydes can be polymerised to give polymers that can be used as photoresists.
527282
Ag Ciba-Geigy
Ciba-Geigy Investments Ltd.
Fetherstonhaugh & Co.
Steinmann Alfred
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