Substrate honing system and method

Details Substrate honing system and method Substrate honing system and method

G - Physics

03

G

G03G 21/00 (2006.01) B24C 3/00 (2006.01) B24C 3/32 (2006.01) G03G 5/04 (2006.01) G03G 8/00 (2006.01) G03G 5/10 (2006.01)

Patent

CA 2170683

A planetary honing system for simultaneously honing a plurality of photoreceptor substrates includes at least one substrate support assembly having a movable support and a plurality of movable support arms arranged in a planetary array. Each support arm is capable of supporting at least one substrate. A honing enclosure surrounds the plurality of substrates. The honing enclosure includes a honing nozzle for applying a honing solution to the plurality of substrates to create a smooth, non-reflective surface on each substrate.

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