Substrate processing apparatus

Details Substrate processing apparatus Substrate processing apparatus

H - Electricity

01

L

H01L 21/68 (2006.01) C23C 16/458 (2006.01) H01L 21/00 (2006.01) H01L 21/687 (2006.01)

Patent

CA 2381113

In the substrate processing apparatus, a ceramic module for mounting a substrate has a flat plate portion having an electric circuitry and a ceramic base body, and as at least a part of a surface of the flat plate portion other than the surface mounting the substrate is in contact with a chamber, it is supported by the chamber. Thus, a substrate processing apparatus can be provided which improves thermal uniformity, reduces cost, is suitable for size reduction of the apparatus and which can ease restrictions in mounting a power supply conductive member or the like.

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