C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 14/34 (2006.01) C03C 17/36 (2006.01) C23C 14/00 (2006.01) C23C 28/00 (2006.01)
Patent
CA 2519651
Titanium and aluminum cathode targets are disclosed for sputtering absorbing coatings of titanium and aluminum-containing materials in atmospheres comprising inert gas, reactive gases such as nitrogen, oxygen, and mixtures thereof, which can further comprise inert gas, such as argon, to form nitrides, oxides, and oxynitrides, as well as metallic films. The titanium and aluminum-containing coatings can be utilized as an outer coat or as one or more coating layers of a coating stack.
L'invention concerne des cibles cathodiques en titane et en aluminium destinées à vaporiser des revêtements absorbants en matériaux contenant du titane ou de l'aluminium dans des atmosphères comprenant des gaz inertes, des gaz réactifs, tels que de l'azote, de l'oxygène et leurs mélanges, lesquels peuvent comprendre de plus des gaz inertes tels que l'argon, ce qui permet de former des nitrures, des oxydes, et des oxynitrures ainsi que des films métalliques. Les revêtements contenant du titane et de l'aluminium peuvent être utilisés en tant que revêtement extérieur ou comme une ou plusieurs couches d'une pile de couches.
Borden Ladner Gervais Llp
Ppg Industries Ohio Inc.
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