Superconducting field effect device having a superconducting...

H - Electricity – 01 – L

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H01L 39/22 (2006.01) H01L 39/02 (2006.01) H01L 39/14 (2006.01) H01L 39/24 (2006.01)

Patent

CA 2243654

A FET type superconducting device comprises a substrate having a principal surface, a thin superconducting channel formed of a c-axis orientated film of an oxide superconductor over the principal surface of the substrate, a superconducting source and a superconducting drain formed of an oxide superconductor over the principal surface of the substrate at the both ends of the superconducting channel which connects the superconducting source region and the superconducting drain region, so that superconducting current can flow through the superconducting channel between the superconducting source region and the superconducting drain region and a gate electrode on a gate insulator disposed on the superconducting channel for controlling the superconducting current flowing through the superconducting channel by a signal voltage applied to the gate electrode; wherein at least a portion of the gate electrode adjacent to the gate insulator is formed of an oxide superconductor same as that of the superconducting channel.

L'invention est un dispositif supraconducteur du type FET comprenant un substrat ayant une surface principale, un canal supraconducteur mince formé d'une couche d'oxyde supraconducteur orienté selon l'axe c et déposé sur la surface principale du substrat, une source supraconductrice et un drain supraconducteur formés d'un oxyde supraconducteur sur la surface principale du substrat aux deux extrémités du canal supraconducteur qui relie la source supraconductrice et le drain supraconducteur de telle façon qu'un courant supraconducteur puisse circuler dans ce canal supraconducteur entre la source supraconductrice et le drain supraconducteur, et une électrode de commande montée sur un isolant déposé sur le canal supraconducteur pour commander la circulation du courant de supraconduction dans le canal supraconducteur au moyen d'une tension appliquée à cette électrode de commande, une partie au moins de cette dernière, qui est voisine de l'isolant, étant faite d'un oxyde supraconducteur identique à celui du canal supraconducteur.

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