H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 39/06 (2006.01) H01L 39/02 (2006.01) H01L 39/24 (2006.01)
Patent
CA 2187113
A superconducting multilayer interconnection comprises a substrate having a principal surface, a first superconducting current path of a c-axis oriented oxide superconductor thin film formed on the principal surface of the substrate, an insulating layer on the first superconducting current path, a second superconducting current path of a c-axis orientated oxide superconductor thin film formed on the insulating layer so that the first and second superconducting current paths are insulated by the insulating layer, and an interconnect current path through which the first and second superconducting current paths are electrically connected each other, which is constituted of two noble metal layers and a resistor layer inserted between the noble metal layers. A method for manufacturing a superconducting multilayer interconnection is also disclosed.
Iiyama Michitomo
Inada Hiroshi
Nakamura Takao
Bereskin & Parr
Iiyama Michitomo
Inada Hiroshi
Nakamura Takao
Sumitomo Electric Industries Ltd.
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