Superconducting thin film and a method for preparing the same

Details Superconducting thin film and a method for preparing the same Superconducting thin film and a method for preparing the same

H - Electricity

01

L

356/112, 117/157

H01L 39/12 (2006.01) B05D 5/12 (2006.01) C23C 16/30 (2006.01) H01L 39/24 (2006.01)

Patent

CA 1336149

An outer surface of a superconducting thin film of compound oxide such as YBa2Cu3O7-.delta. is protected with a protective layer which is composed of any one of (i) oxide of metal such as SiO2 and TiO2, (ii) carbide such as SiC, (iii) nitride such as BN or (iv) the same material as the substrate such as SrTiO3.

571317

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