Superconducting thin film material and method for...

H - Electricity – 01 – B

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H01B 12/06 (2006.01) C23C 14/08 (2006.01) C23C 16/40 (2006.01) H01B 13/00 (2006.01) H01L 21/205 (2006.01) H01L 39/24 (2006.01)

Patent

CA 2650894

Disclosed is a superconducting thin film material (1) having excellent characteristics such as high JC and high IC, which can be produced at low cost. The superconducting thin film material (1) comprises a metal textured substrate (10) and an oxide superconducting film (30) formed on the metal textured substrate (10). The oxide superconducting film (30) comprises a physically deposited HoBCO layer (31) formed by physical deposition and a metal organic deposited HoBCO layer (32) formed on the physically deposited HoBCO layer (31) by metal organic deposition.

L'invention concerne un matériau (1) à film mince supraconducteur présentant d'excellentes caractéristiques, par exemple des J<SUB>C</SUB> et I<SUB>C </SUB>élevées, et pouvant être produit à moindre coût. Le matériau (1) à film mince supraconducteur comprend un substrat métallique texturé (10) et un film d'oxyde supraconducteur (30) formé sur le substrat métallique texturé (10). Le film d'oxyde supraconducteur (30) comprend une couche de HoBCO (31) formée par dépôt physique et une couche de HoBCO (32) formée par dépôt organométallique sur la couche de HoBCO (31) à dépôt physique.

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