Support bar and substrate cassette

Details Support bar and substrate cassette Support bar and substrate cassette

B - Operations, Transporting

65

G

B65G 49/06 (2006.01) B65D 85/48 (2006.01)

Patent

CA 2643291

The present invention relates to a substrate cassette support bar in a substrate cassette for housing a plurality of horizontally oriented substrates in multiple levels in the vertical direction, the substrate bar being arranged so as to inhibit bending of the central portion of each substrate, comprising: an upper plate made of a carbon fiber composite material; a lower plate made of a carbon fiber composite material; and an intermediate member disposed between the upper plate and the lower plate, and made of a material other than a carbon fiber composite material.

La présente invention concerne une barre de support de cassette de substrats dans une cassette de substrats destiné à recevoir une pluralité de substrats orientés à l'horizontale dans une pluralité d'étages à la verticale, la barre de substrats étant agencé de manière à empêcher le cintrage de la partie centrale de chaque substrat, comprenant: une plaque supérieure réalisée en un matériau composite à base de fibre de carbone; une plaque inférieure réalisée en un matériau composite à base de fibre de carbone; et un élément intermédiaire disposé entre la plaque supérieure et la plaque inférieure, et réalisé en un matériau autre qu'un matériau composite à base de fibre de carbone.

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